Since DE&T R&D Center was founded, DE&T R&D Center has researched and developed core technologies for inspection-equipment and pre-processing-equipment in the field of FPD and semiconductors. Also, DE&T R&D Center turned the technology into products and supplied in a large number of various equipment to the leading global semiconductor and FPD manufacturers, such as Samsung Electronics, AU Optronics, etc. Therefore, the excellence of DE&T's technology has achieved international recognition. Moreover, DE&T R&D Center makes efforts to accelerate the development of the core technologies of new, next-generation equipment through self-development, national assistant projects(cooperative development between industry and academic organization, manpower training projects, etc.) and overseas technology-transfer projects.
In the field of technology development which is getting left behind with a little carelessness, the researchers of DE&T are striving to develop technology with youth spirit and venture sprit in order to lead the development of core technology for cutting-edge semiconductor and FPD equipments.
It is a precision process control technique using On-the-Fly method which is peocessed by interocking scanner-stage. In addition to eliminating discontinuous processing characteristics that can be occured at the boundary of the scan area of existing step-scan method, it is possible to process the shortest route at a constant speed which enables high-quality and high-productivity processing.
This technique is used for geometric data that can be occurred by external factors. By correcting the CAD data, it is possible to process at the precise position.
This technique is for shortest process route optimization to minimize total process time through the self-developed algorithm.