Introduction

This equipment is designed to check the presence of array patterns by loading glass formed by TFT array pattern, performing precision alignment using camera, and contacting the automatically loaded probe unit in each cell.

Main Components

• Glass Loader : Glass load/unload, turn/primary alignment
• Stage : Transfers glass to vacuum and probe unit position
• Contact : Lighting unit
• UVW : Fine aligner
• Review Camera : Defective image acquisition device
• Device Change : Option (Probe unit stocker)
• Test Station : Inspects array pattern defect

Machine Key Specification

Inspection Cell Size	4.5G , ~ 6G
Panel Thickness	Min : 0.3mm, Max: 1.1mm (Base on single plate)
Panel Alignment Method & Accuracy	UVW Stage Align (± 3㎛)
Inspection Tact Time	1.5~2.0sec(unit : Stick)
Inspection Height	1,200~2,000mm (TBD)
Pass Line	1,300~2,100mm (TBD)
Review Camera	2.5x ~ 50x (Objective Lens)
System Main Control	I/PC : industrial PC

* The above specification changes according to the Inspection Cell size.