TFT Array Pattern이 형성된 Glass를 투입 및 Camera를 이용하여 정밀 Align을 행한후 자동으로 투입된 Probe Unit을 각 Cell 단위로 Contact 하여 Array Pattern 불량 유무를 확인하기 위한 설비입니다.
Inspection Cell Size | 4.5G , ~ 6G |
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Probing Method | Shorting Bar Type / Full Contact Type |
Panel Thickness | Min : 0.3mm, Max: 1.1mm (Base on single plate) |
Panel Alignment Method & Accuracy | UVW Stage Align (± 3㎛) |
Inspection Tact Time | 1.5~2.0sec(unit : Stick) |
Inspection Height | 1,200~2,000mm (TBD) |
Pass Line | 1,300~2,100mm (TBD) |
Review Camera | 2.5x ~ 50x (Objective Lens) |
System Main Control | I/PC : industrial PC |
Probe Contact | Shorting Bar & Full Contact Type (1 Stick Contact) |
Device Change | 5 Probe Unit(Stock Capa') |
* 상기 Specification은 Inspection Cell Size에 따라 변경됨.